FILM FORMING METHOD AND FILM FORMING APPARATUS

Details for Australian Patent Application No. 2003281011 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors YAMASAKI, Hideaki; ARIMA, Susumu; KAWANO, Yumiko

Pub. Number AU-A-2003281011

PCT Number PCT/JP2003/0088

PCT Pub. Number WO2004/008518

Priority 2002-201534 10.07.02 JP

Filing date 10 July 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/314 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/10 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including a plurality of individual components in a repetitive configuration

Event Publications

4 March 2004 Complete Application Filed

  Priority application(s): 2002-201534 10.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003281011

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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