PROCESSING SYSTEM AND CLEANING METHOD

Details for Australian Patent Application No. 2002346146 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors AKAHORI, Takashi; NAKASE, Risa; ARAMI, Junichi

Pub. Number AU-A-2002346146

PCT Number PCT/JP02/06734

PCT Pub. Number WO2003/005427

Priority 2001-201946 03.07.01 JP

Filing date 3 July 2002

Wipo publication date 21 January 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 2001-201946 03.07.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002346146

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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