FILM FORMING METHOD, MULTILAYER FILM REFLECTOR MANUFACTURING METHOD, AND FILM FORMING DEVICE

Details for Australian Patent Application No. 2002233737 (hide)

Owner NIKON CORPORATION

Inventors KANDAKA, Noriaki

Pub. Number AU-A-2002233737

PCT Pub. Number WO2002/077316

Priority 2001-83094 22.03.01 JP; 2001-83095 22.03.01 JP

Filing date 26 February 2002

Wipo publication date 8 October 2002

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

G02B 005/28 Optical elements other than lenses - Interference filters

C23C 014/46 Coating by vacuum evaporation, by sputtering or by ion implantation - by ion beam produced by an external ion source

G02B 005/08 Optical elements other than lenses - Mirrors

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002233737

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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