EXTREME ULTRAVIOLET GENERATING DEVICE, EXPOSURE DEVICE USING THE GENERATING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD

Details for Australian Patent Application No. 2002233738 (hide)

Owner NIKON CORPORATION

Inventors KANDAKA, Noriaki

Pub. Number AU-A-2002233738

PCT Pub. Number WO2002/069677

Priority 2001-049728 26.02.01 JP

Filing date 26 February 2002

Wipo publication date 12 September 2002

International Classifications

H05G 002/00 Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002233738

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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