Methods and apparatus of arc prevention during RF sputtering of a thin film on a substrate

Details for Australian Patent Application No. 2011202982 (hide)

Owner PrimeStar Solar, Inc.

Inventors Halloran, Sean Timothy

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011202982

Priority 12/827,053 30.06.10 US

Filing date 21 June 2011

Wipo publication date 19 January 2012

International Classifications

C23C 14/18 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - on other inorganic substrates

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 14/54 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

H01L 31/0296 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

Event Publications

7 July 2011 Complete Application Filed

  Priority application(s): 12/827,053 30.06.10 US

19 January 2012 Application Open to Public Inspection

  Published as AU-A-2011202982

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