Integrated gearbox and rotary feedthrough system for a vacuum chamber structure

Details for Australian Patent Application No. 2011202981 (hide)

Owner PrimeStar Solar, Inc.

Inventors Black, Russell Weldon

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011202981

Priority 12/826,966 30.06.10 US

Filing date 21 June 2011

Wipo publication date 19 January 2012

International Classifications

F16H 1/16 (2006.01) Toothed gearings for conveying rotary motion

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 16/458 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C23C 16/54 (2006.01) Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

F16J 15/54 (2006.01) Sealings

Event Publications

7 July 2011 Complete Application Filed

  Priority application(s): 12/826,966 30.06.10 US

19 January 2012 Application Open to Public Inspection

  Published as AU-A-2011202981

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