Owner PrimeStar Solar, Inc.

Inventors Black, Russell Weldon; Murphy, Brian Robert

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011201683

Priority 12/765,295 22.04.10 US

Filing date 14 April 2011

Wipo publication date 10 November 2011

H01L 31/18 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

C23C 14/50 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 16/54 (2006.01) Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

H01L 31/0392 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation