Methods for high-rate sputtering of a compound semiconductor on large area substrates

Details for Australian Patent Application No. 2011201682 (hide)

Owner PrimeStar Solar, Inc.

Inventors Halloran, Sean Timothy; Gossman, Robert Dwayne; Black, Russell Weldon

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2011201682

Priority 12/765,268 22.04.10 US

Filing date 14 April 2011

Wipo publication date 10 November 2011

International Classifications

C23C 14/35 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

C23C 14/56 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

28 April 2011 Complete Application Filed

  Priority application(s): 12/765,268 22.04.10 US

10 November 2011 Application Open to Public Inspection

  Published as AU-A-2011201682

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