PECVD coating using an organosilicon precursor

Details for Australian Patent Application No. 2010249033 (hide)

Owner CV Holdings, LLC

Inventors Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Pangborn, Robert J.; Sagona, Peter J.

Agent Spruson & Ferguson

Pub. Number AU-A-2010249033

PCT Pub. Number WO2010/132591

Priority 61/285,813 11.12.09 US; 10162758.6 12.05.10 EP; 61/299,888 29.01.10 US; 10162755.2 12.05.10 EP; 61/177,984 13.05.09 US; 61/213,904 24.07.09 US; 61/234,505 17.08.09 US; 61/318,197 26.03.10 US; 10162756.0 12.05.10 EP; 10162760.2 12.05.10 EP; 10162761.0 12.05.10 EP; 61/298,159 25.01.10 US; 61/333,625 11.05.10 US; 61/261,321 14.11.09 US; 61/263,289 20.11.09 US; 61/222,727 02.07.09 US; 10162757.8 12.05.10 EP

Filing date 12 May 2010

Wipo publication date 18 November 2010

International Classifications

C23C 16/30 (2006.01) Chemical deposition or plating by decomposition - Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides

C23C 14/40 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation

C23C 16/24 (2006.01) Chemical deposition or plating by decomposition

C23C 16/50 (2006.01) Chemical deposition or plating by decomposition - using electric discharges

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 November 2011 PCT application entered the National Phase

  PCT publication WO2010/132591 Priority application(s): WO2010/132591

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