Film-forming apparatus, matching unit, and impedance control method

Details for Australian Patent Application No. 2010206014 (hide)

Owner Mitsubishi Heavy Industries Food & Packaging Machinery Co., Ltd. Kirin Beer Kabushiki Kaisha

Inventors Yamakoshi, Hideo; Matsuda, Satoshi; Goto, Seiji; Asahara, Yuji

Agent Spruson & Ferguson

Pub. Number AU-B-2010206014

Parent 2006211246

Filing date 28 July 2010

Wipo publication date 19 August 2010

Acceptance publication date 12 January 2012

International Classifications

C23C 16/505 (2006.01) Chemical deposition or plating by decomposition

B65D 1/00 (2006.01) General kinds of rigid or semi-rigid containers

H05H 1/46 (2006.01) Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

Event Publications

19 August 2010 Application Open to Public Inspection

  Published as AU-B-2010206014

19 August 2010 Complete Application Filed

4 August 2011 Assignment before Grant

  Mitsubishi Heavy Industries Food & Packaging Machinery Co., Ltd.; Kirin Holdings Kabushiki Kaisha The application has been assigned to Mitsubishi Heavy Industries Food & Packaging Machinery Co., Ltd.; Kirin Beer Kabushiki Kaisha

12 January 2012 Application Accepted

  Published as AU-B-2010206014

10 May 2012 Standard Patent Sealed

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2010206015-Agglomerated material containing recycled silicon

2010206013-A property scheme management system and method