Film-forming apparatus, matching unit, and impedance control method

Details for Australian Patent Application No. 2006211246 (hide)

International Classifications

Event Publications

13 September 2007 PCT application entered the National Phase

PCT publication WO2006/082731 Priority application(s): WO2006/082731

26 August 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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