Vapour delivery system

Details for Australian Patent Application No. 2008303385 (hide)

Owner P2I Limited

Inventors Woodcock, Malcolm

Agent Shelston IP

Pub. Number AU-A-2008303385

PCT Pub. Number WO2009/040542

Priority 0718801.4 25.09.07 GB

Filing date 25 September 2008

Wipo publication date 2 April 2009

International Classifications

C23C 16/44 (2006.01) Chemical deposition or plating by decomposition - characterised by the method of coating

B05D 7/24 (2006.01) Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials - for applying particular liquids or other fluent materials

C23C 16/448 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

1 April 2010 PCT application entered the National Phase

  PCT publication WO2009/040542 Priority application(s): WO2009/040542

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