Vapour delivery system

Details for Australian Patent Application No. 2008303379 (hide)

Owner P2I Limited

Inventors Hopper, Fred

Agent Shelston IP

Pub. Number AU-A-2008303379

PCT Pub. Number WO2009/040536

Priority 0718686.9 25.09.07 GB

Filing date 25 September 2008

Wipo publication date 2 April 2009

International Classifications

C23C 16/448 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

1 April 2010 PCT application entered the National Phase

  PCT publication WO2009/040536 Priority application(s): WO2009/040536

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2008303385-Vapour delivery system

2008303374-Adjustable star wheel