Microwave power source device

Details for Australian Patent Application No. 2008202970 (hide)

Owner Toyo Seikan Kaisha, Ltd.

Inventors Yamada, Koji; Kurashima, Hideo; Inagaki, Hajime; Kobayashi, Akira; Namiki, Tsunehisa; leki, Toshihide

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-A-2008202970

Parent 2003271138

Filing date 3 July 2008

Wipo publication date 31 July 2008

International Classifications

C23C 16/40 (2006.01) Chemical deposition or plating by decomposition - Oxides

C23C 16/02 (2006.01) Chemical deposition or plating by decomposition - Pretreatment of the material to be coated

C23C 16/04 (2006.01) Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 16/511 (2006.01) Chemical deposition or plating by decomposition

C23C 16/515 (2006.01) Chemical deposition or plating by decomposition

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

24 July 2008 Complete Application Filed

31 July 2008 Application Open to Public Inspection

  Published as AU-A-2008202970

19 February 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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