Method of forming metal oxide film and microwave power source unit for use in the method

Details for Australian Patent Application No. 2003271138 (hide)

Owner Toyo Seikan Kaisha, Ltd

Inventors Kpbayashi, Akira; Kurashima, Hideo; Inagaki, Hajime; Yamada, Koji; Ieki, Toshihide; Namiki, Tsunehisa

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2003271138

PCT Number PCT/JP03/12946

PCT Pub. Number WO2004/033753

Priority 2003-116301 21.04.03 JP; 2002-295908 09.10.02 JP; 2003-112136 16.04.03 JP

Filing date 9 October 2003

Wipo publication date 4 May 2004

Acceptance publication date 10 July 2008

International Classifications

C23C 16/40 (2006.01) Chemical deposition or plating by decomposition - Oxides

C23C 16/02 (2006.01) Chemical deposition or plating by decomposition - Pretreatment of the material to be coated

C23C 16/04 (2006.01) Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 16/511 (2006.01) Chemical deposition or plating by decomposition

C23C 16/515 (2006.01) Chemical deposition or plating by decomposition

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 2003-116301 21.04.03 JP; 2002-295908 09.10.02 JP; 2003-112136 16.04.03 JP

3 June 2004 Application Open to Public Inspection

  Published as AU-B-2003271138

10 July 2008 Application Accepted

  Published as AU-B-2003271138

6 November 2008 Standard Patent Sealed

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