Device and method for locally producing microwave plasma

Details for Australian Patent Application No. 2007312620 (hide)

Owner iplas Innovative Plasma Systems GmbH

Inventors Spitzl, Ralf

Agent Hodgkinson McInnes

Pub. Number AU-A-2007312620

PCT Pub. Number WO2008/046553

Priority 10 2006 048 816.4 16.10.06 DE

Filing date 11 October 2007

Wipo publication date 24 April 2008

International Classifications

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

4 June 2009 PCT application entered the National Phase

  PCT publication WO2008/046553 Priority application(s): WO2008/046553

14 April 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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