Device and method for producing microwave plasma with a high plasma density

Details for Australian Patent Application No. 2007312619 (hide)

Owner iplas Innovative Plasma Systems GmbH

Inventors Spitzl, Ralf

Agent Hodgkinson McInnes

Pub. Number AU-A-2007312619

PCT Pub. Number WO2008/046552

Priority 10 2006 048 814.8 16.10.06 DE

Filing date 11 October 2007

Wipo publication date 24 April 2008

International Classifications

H05H 1/46 (2006.01) Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

H01J 37/32 (2006.01) Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

4 June 2009 PCT application entered the National Phase

  PCT publication WO2008/046552 Priority application(s): WO2008/046552

14 April 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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