Inductively-coupled RF power source

Details for Australian Patent Application No. 2006318772 (hide)

Owner Thermo Fisher Scientific Inc.

Inventors Mattaboni, Paul J.; Fletcher, Roger; Mellor, Robert

Agent Spruson & Ferguson

Pub. Number AU-A-2006318772

PCT Pub. Number WO2007/061879

Priority 11/285,530 21.11.05 US

Filing date 16 November 2006

Wipo publication date 31 May 2007

International Classifications

H03L 7/06 (2006.01) Automatic control of frequency or phase - using a reference signal applied to a frequency- or phase-locked loop

H03L 5/02 (2006.01) Automatic control of voltage, current, or power

H05H 1/46 (2006.01) Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

G01N 21/73 (2006.01) Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H05H 1/30 (2006.01) Generating plasma

Event Publications

12 June 2008 PCT application entered the National Phase

  PCT publication WO2007/061879 Priority application(s): WO2007/061879

23 February 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(e). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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