Accelerometer protected by caps applied at the wafer scale

Details for Australian Patent Application No. 2005201836 (hide)

Owner Silverbrook Research Pty Ltd

Inventors Silverbrook, Kia

Agent Silverbrook Research Pty. Ltd.

Pub. Number AU-B-2005201836

Parent 2002218868

Filing date 2 May 2005

Wipo publication date 19 May 2005

Acceptance publication date 10 November 2005

International Classifications

G01P 015/08 Measuring acceleration - with conversion into electric or magnetic values

H01L 023/04 Details of semiconductor or other solid state devices

H01L 021/822 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 May 2005 Application Open to Public Inspection

  Published as AU-B-2005201836

19 May 2005 Complete Application Filed

10 November 2005 Application Accepted

  Published as AU-B-2005201836

9 March 2006 Standard Patent Sealed

2 August 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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