Accelerometer protected by caps applied at the wafer scale

Details for Australian Patent Application No. 2002218868 (hide)

Owner Silverbrook Research Pty. Ltd.

Inventors Silverbrook, Kia

Agent Silverbrook Research Pty. Ltd.

Pub. Number AU-B-2002218868

PCT Pub. Number WO2002/056031

Priority PR 2453 10.01.01 AU

Filing date 8 January 2002

Wipo publication date 24 July 2002

Acceptance publication date 3 February 2005

International Classifications

G01P 015/08 Measuring acceleration - with conversion into electric or magnetic values

H01L 021/822 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/04 Details of semiconductor or other solid state devices

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-B-2002218868

3 February 2005 Application Accepted

  Published as AU-B-2002218868

30 June 2005 Standard Patent Sealed

14 July 2005 Application for Amendment

  The nature of the amendment is as shown in the statement(s) filed 06 Jun 2005. Address for service in Australia - Silverbrook Research Pty. Ltd. 393 Darling Street Balmain NSW 2041

10 November 2005 Amendment Made

  The nature of the amendment is as shown in the statement(s) filed 06 Jun 2005

15 December 2005 Standard Patent Sealed

2 August 2012 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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