Vacuum deposition apparatus and method and solar cell material

Details for Australian Patent Application No. 2004234807 (hide)

Owner Ishikawajima-Harima Heavy Industries Co., Ltd.

Inventors Hasegawa, Noriaki; Yamasaki, Shusaku; Mizuno, Masayuki

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2004234807

PCT Pub. Number WO2004/097913

Priority 2003-126961 02.05.03 JP; 2004-079964 19.03.04 JP

Filing date 30 April 2004

Wipo publication date 11 November 2004

Acceptance publication date 6 August 2009

International Classifications

C23C 16/46 (2006.01) Chemical deposition or plating by decomposition - characterised by the method used for heating the substrate

Event Publications

3 November 2005 PCT application entered the National Phase

  PCT publication WO2004/097913 Priority application(s): WO2004/097913

6 August 2009 Application Accepted

  Published as AU-B-2004234807

3 December 2009 Standard Patent Sealed

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