Substrate transfer device of thin-film forming apparatus

Details for Australian Patent Application No. 2004234806 (hide)

Owner Ishikawajima-Harima Heavy Industries Co., Ltd.

Inventors Yamasaki, Shusaku; Hasegawa, Noriaki

Agent Phillips Ormonde Fitzpatrick

Pub. Number AU-B-2004234806

PCT Pub. Number WO2004/097912

Priority 2003-126960 02.05.03 JP

Filing date 30 April 2004

Wipo publication date 11 November 2004

Acceptance publication date 22 October 2009

International Classifications

B65G 49/06 (2006.01) Conveying systems characterised by their application for specified purposes not otherwise provided for

C23C 16/44 (2006.01) Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 16/54 (2006.01) Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

H01L 21/205 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/677 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/04 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - adapted as conversion devices

Event Publications

3 November 2005 PCT application entered the National Phase

  PCT publication WO2004/097912 Priority application(s): WO2004/097912

22 October 2009 Application Accepted

  Published as AU-B-2004234806

26 November 2009 Corrigenda

  Applications Accepted - Name Index Under the name Ishikawajima-Harima Heavy Industries Co., Ltd., Application No. 2004234806, under INID (54) correct the title to read Substrate transfer device for thin-film deposition apparatus

18 February 2010 Standard Patent Sealed

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2004234807-Vacuum deposition apparatus and method and solar cell material

2004234798-Recording medium, reproduction apparatus, recording method, reproducing method, program, and integrated circuit for recording a video stream and graphics with window information over graphics display