METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003303274 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors SHI, Xiaoping; MAGNEE, Petrus, H., C.; DONKERS, Johannes, J., T., M.

Pub. Number AU-A-2003303274

PCT Number PCT/IB2003/0060

PCT Pub. Number WO2004/057654

Priority 02080509.9 20.12.02 EP

Filing date 16 December 2003

Wipo publication date 14 July 2004

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 August 2004 Complete Application Filed

  Priority application(s): 02080509.9 20.12.02 EP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003303274

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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