METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE OBTAINED WITH SUCH A METHOD

Details for Australian Patent Application No. 2003303273 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors DACHS, Charles, J., J.; HOOKER, Jacob, C.; VAN DAL, Marcus, J., H.; VENEZIA, Vincent, C.

Pub. Number AU-A-2003303273

PCT Number PCT/IB2003/0060

PCT Pub. Number WO2004/057659

Priority 02080508.1 20.12.02 EP

Filing date 15 December 2003

Wipo publication date 14 July 2004

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 August 2004 Complete Application Filed

  Priority application(s): 02080508.1 20.12.02 EP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003303273

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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