METHOD OF FORMING A CATALYST CONTAINING LAYER OVER A PAT- TERNED DIELECTRIC

Details for Australian Patent Application No. 2003299875 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors NOPPER, Markus; PREUSSE, Axel

Pub. Number AU-A-2003299875

PCT Number PCT/US2003/0411

PCT Pub. Number WO2004/068576

Priority 103 02 644.4 23.01.03 DE; 10/602,192 24.06.03 US

Filing date 22 December 2003

Wipo publication date 23 August 2004

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 103 02 644.4 23.01.03 DE; 10/602,192 24.06.03 US

23 September 2004 Application Open to Public Inspection

  Published as AU-A-2003299875

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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