METHOD OF FORMING SUB-MICRON-SIZE STRUCTURES OVER A SUBSTRATE

Details for Australian Patent Application No. 2003297044 (hide)

Owner INTER CORPORATION

Inventors HARELAND, Scott; DOYLE, Brian; CHAU, Robert

Pub. Number AU-A-2003297044

PCT Number PCT/US2003/0397

PCT Pub. Number WO2004/071153

Priority 10/364,281 10.02.03 US

Filing date 12 December 2003

Wipo publication date 6 September 2004

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/364,281 10.02.03 US

7 October 2004 Application Open to Public Inspection

  Published as AU-A-2003297044

27 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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