SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003292701 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors OHTA, Tomohiro; KONDOH, Eiichi; VEZIN, Vincent; KUBO, Kenichi; KUREISHI, Yoshinori

Pub. Number AU-A-2003292701

PCT Number PCT/JP2003/0169

PCT Pub. Number WO2004/095557

Priority 2003-17948 27.01.03 JP

Filing date 26 December 2003

Wipo publication date 19 November 2004

International Classifications

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 2003-17948 27.01.03 JP

16 December 2004 Application Open to Public Inspection

  Published as AU-A-2003292701

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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