OPTICAL ASSEMBLY FOR PHOTOLITHOGRAPHY

Details for Australian Patent Application No. 2003290094 (hide)

Owner ASML NETHERLANDS B.V. CARL ZEISS SMT AG

Inventors KWAN, Yim-Bun, Patrick; LOOPSTRA, Erik

Pub. Number AU-A-2003290094

PCT Number PCT/EP2003/0145

PCT Pub. Number WO2005/050323

Priority 103 50 546.6 29.10.03 DE

Filing date 18 December 2003

Wipo publication date 8 June 2005

International Classifications

G02B 005/00 Optical elements other than lenses

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 103 50 546.6 29.10.03 DE

28 July 2005 Application Open to Public Inspection

  Published as AU-A-2003290094

13 July 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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