COATED OPTICAL ELEMENT FOR CORRECTIVE ACTION OBTAINED BY PRODUCING LAYER THICKNESS VARIATIONS OR BY REFRACTION FACTOR VARIATIONS IN SAID COATING

Details for Australian Patent Application No. 2003290093 (hide)

Owner CARL ZEISS SMT AG

Inventors PAZIDIS, Alexandra; GOHNERMEIER, Aksel; DINGER, Alexander; PETASCH, Thomas; BOHM, Thure; BORRET, Rainer; REISINGER, Gerd

Pub. Number AU-A-2003290093

PCT Number PCT/EP2003/0145

PCT Pub. Number WO2004/057378

Priority 102 59 536.4 19.12.02 DE

Filing date 18 December 2003

Wipo publication date 14 July 2004

International Classifications

G02B 001/10 Optical elements characterised by the material of which they are made - Optical coatings produced by application to, or surface treatment of, optical elements

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 003/04 Simple or compound lenses

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

Event Publications

8 April 2004 Complete Application Filed

  Priority application(s): 102 59 536.4 19.12.02 DE

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003290093

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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