SILICA GLASS JIG USED IN PROCESS FOR MANUFACTURING SEMICONDUCTOR AND METHOD OF MANUFACTURING SILICA GLASS JIG

Details for Australian Patent Application No. 2003289124 (hide)

Owner SHIN-ETSU QUARTZ PRODUCTS CO., LTD.

Inventors ITO, Chikashi; IWAMI, Toshifumi; KIMURA, Hiroyuki

Pub. Number AU-A-2003289124

PCT Number PCT/JP2003/0154

PCT Pub. Number WO2004/051724

Priority 2002-351439 03.12.02 JP

Filing date 2 December 2003

Wipo publication date 23 June 2004

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 April 2004 Complete Application Filed

  Priority application(s): 2002-351439 03.12.02 JP

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003289124

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

1 September 2005 Corrigenda

  Applications OPI - Name Index Under the name SHIN-ETSU QUARTZ PRODUCTS CO., LTD., Application No. 2003289124, under INID (71) correct the name to read SHIN-ETSU QUARTZ PRODUCTS CO., LTD.; FUKUI SHIN-ETSU QUARTS CO., LTD.

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