METHOD OF DETERMINING OPTICAL PROPERTIES AND PROJECTION EXPOSURE SYSTEM COMPRISING A WAVE FRONT DETECTION SYSTEM

Details for Australian Patent Application No. 2003273925 (hide)

Owner CARL ZEISS SMT AG

Inventors SCHRIEVER, Martin; LAUER, Steffen; WEGMANN, Ulrich; EMER, Wolfgang; SAKOWSKI, Harald

Pub. Number AU-A-2003273925

PCT Number PCT/EP03/10720

PCT Pub. Number WO2005/031466

Filing date 26 September 2003

Wipo publication date 14 April 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

12 February 2004 Complete Application Filed

2 June 2005 Application Open to Public Inspection

  Published as AU-A-2003273925

15 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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