ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM-USE REFLECTION MIRROR, ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, APPLICATION METHOD FOR ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, PRODUCTION METHOD FOR ULTRASHORT ULTRAVIOLET OPTICAL SYSTEM, ULTRA-SHORT ULTRAVIOLET EXPOSURE SYSTEM, AND APPLICATION METHOD FOR ULTRASHORT ULTRAVIOLET EXPOSU

Details for Australian Patent Application No. 2003271130 (hide)

Owner NIKON CORPORATION

Inventors MURAKAMI, Katsuhiko

Pub. Number AU-A-2003271130

PCT Number PCT/JP03/12887

PCT Pub. Number WO2004/034447

Priority 2002-297025 10.10.02 JP; 2002-312146 28.10.02 JP

Filing date 8 October 2003

Wipo publication date 4 May 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 005/08 Optical elements other than lenses - Mirrors

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 2002-297025 10.10.02 JP; 2002-312146 28.10.02 JP

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003271130

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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