POLARIZATION-OPTIMIZED AXICON SYSTEM, AND AN ILLUMINATING SYSTEM FOR MICROLITHOGRAPHIC PROJECTION SYSTEM HAVING SUCH AN AXICON SYSTEM

Details for Australian Patent Application No. 2003264131 (hide)

Owner CARL ZEISS SMT AG

Inventors SINGER, Wolfgang; MAUL, Manfred; KOHL, Alexander; FIOLKA, Damian; FURTER, Gerhard

Pub. Number AU-A-2003264131

PCT Number PCT/EP03/09613

PCT Pub. Number WO2004/102230

Priority 103 22 375.4 13.05.03 DE

Filing date 29 August 2003

Wipo publication date 3 December 2004

International Classifications

G02B 005/00 Optical elements other than lenses

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

11 December 2003 Complete Application Filed

  Priority application(s): 103 22 375.4 13.05.03 DE

13 January 2005 Application Open to Public Inspection

  Published as AU-A-2003264131

2 February 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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