PLASMA PROCESSING DEVICE

Details for Australian Patent Application No. 2003262240 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors NOZAWA, Toshihisa; ISHIBASHI, Kiyotaka

Pub. Number AU-A-2003262240

PCT Number PCT/JP03/10391

PCT Pub. Number WO2004/019397

Priority 2002-239030 20.08.02 JP

Filing date 15 August 2003

Wipo publication date 11 March 2004

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 November 2003 Complete Application Filed

  Priority application(s): 2002-239030 20.08.02 JP

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003262240

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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