EPITAXIAL WAFER AND ITS MANUFACTURING METHOD

Details for Australian Patent Application No. 2003262239 (hide)

Owner SUMITOMO MITSUBISHI SILICON CORPORATION

Inventors UMENO, Shigeru; MURAKAMI, Satoshi; FUJII, Hirotaka

Pub. Number AU-A-2003262239

PCT Number PCT/JP03/10390

PCT Pub. Number WO2004/020705

Priority 2002-252463 30.08.02 JP

Filing date 15 August 2003

Wipo publication date 19 March 2004

International Classifications

C30B 029/06 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Silicon

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 November 2003 Complete Application Filed

  Priority application(s): 2002-252463 30.08.02 JP

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003262239

2 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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