PROCESSING DEVICE, MOUNTING TABLE, PROCESSING METHOD

Details for Australian Patent Application No. 2003257622 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KANNAN, Hiroshi; OSHIMA, Yasuhiro

Pub. Number AU-A-2003257622

PCT Number PCT/JP03/10508

PCT Pub. Number WO2004/021422

Priority 2002/252272 30.08.02 JP

Filing date 20 August 2003

Wipo publication date 19 March 2004

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/509 Chemical deposition or plating by decomposition

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 2002/252272 30.08.02 JP

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003257622

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003257623-FLUOROSURFACTANTS

2003257621-CLEANING METHOD FOR SUBSTRATE-PROCESSING DEVICE AND THE DEVICE