INSPECTION CONDITION DATA MANAGEMENT METHOD, SYSTEM, PROGRAM, AND INSPECTION DEVICE

Details for Australian Patent Application No. 2003257548 (hide)

Owner HITACHI, LTD.

Inventors ASAKAWA, Yohei; ONO, Makoto; FUJIKI, Daisuke

Pub. Number AU-A-2003257548

PCT Number PCT/JP03/10787

PCT Pub. Number WO2004/021416

Priority 2002-247219 27.08.02 JP

Filing date 26 August 2003

Wipo publication date 19 March 2004

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

G05B 019/418 Programme-control systems - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 2002-247219 27.08.02 JP

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003257548

19 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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