METHOD FOR CONTROLLING A RECESS ETCH PROCESS

Details for Australian Patent Application No. 2003255273 (hide)

Event Publications

6 November 2003 Complete Application Filed

Priority application(s): 10/401,118 27.03.03 US; 60/403,213 13.08.02 US; 60/408,619 06.09.02 US; 10/286,410 01.11.02 US; 10/286,409 01.11.02 US

8 April 2004 Application Open to Public Inspection

Published as AU-A-2003255273

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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