PROCESS ENDPOINT DETECTION METHOD USING BROADBAND REFLECTOMETRY

Details for Australian Patent Application No. 2003255272 (hide)

Owner LAM RESEARCH CORPORATION

Inventors VENUGOPAL, Vijayakumar, C.

Pub. Number AU-A-2003255272

PCT Number PCT/US03/25155

PCT Pub. Number WO2004/015365

Priority 10/286,409 01.11.02 US; 10/401,118 27.03.03 US; 60/403,213 13.08.02 US; 60/408,619 06.09.02 US; 10/286,410 01.11.02 US

Filing date 12 August 2003

Wipo publication date 25 February 2004

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

6 November 2003 Complete Application Filed

  Priority application(s): 10/286,409 01.11.02 US; 10/401,118 27.03.03 US; 60/403,213 13.08.02 US; 60/408,619 06.09.02 US; 10/286,410 01.11.02 US

8 April 2004 Application Open to Public Inspection

  Published as AU-A-2003255272

5 May 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003255273-METHOD FOR CONTROLLING A RECESS ETCH PROCESS

2003255271-PROVIDING DC ISOLATION IN SWITCHING AMPLIFIERS