DUAL DAMASCENE TRENCH DEPTH MONITORING

Details for Australian Patent Application No. 2003249718 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LYONS, Christopher, F.; SUBRAMANIAN, Ramkumar

Pub. Number AU-A-2003249718

PCT Number PCT/US03/21108

PCT Pub. Number WO2004/013907

Priority 10/212,983 05.08.02 US

Filing date 3 July 2003

Wipo publication date 23 February 2004

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 10/212,983 05.08.02 US

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003249718

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003249719-An hydroxytyrosol-rich composition from olive vegetation water and method of use thereof

2003249717-PROCESS FOR MANUFACTURING MOSFETS USING AMORPHOUS CARBON REPLACEMENT GATE AND STRUCTURES FORMED IN ACCORDANCE THEREWITH