PROCESS FOR MANUFACTURING MOSFETS USING AMORPHOUS CARBON REPLACEMENT GATE AND STRUCTURES FORMED IN ACCORDANCE THEREWITH

Details for Australian Patent Application No. 2003249717 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors YANG, Chih, Yuh; BELL, Scott, A.; CHAN, Darin, A.; FISCHER, Philip, A.; LYONS, Christopher, F.; CHANG, Mark, S.; GAO, Pei-Yuan; WRIGHT, Marilyn, I.; YOU, Lu; BONSER, Douglas, J.; PLAT, Marina, V.

Pub. Number AU-A-2003249717

PCT Number PCT/US03/21107

PCT Pub. Number WO2004/012256

Priority 60/400,123 31.07.02 US; 10/335,473 31.12.02 US

Filing date 3 July 2003

Wipo publication date 16 February 2004

International Classifications

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

16 October 2003 Complete Application Filed

  Priority application(s): 60/400,123 31.07.02 US; 10/335,473 31.12.02 US

25 March 2004 Application Open to Public Inspection

  Published as AU-A-2003249717

14 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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