METHOD OF PREDICTING PROCESSING DEVICE CONDITION OR PROCESSED RESULT

Details for Australian Patent Application No. 2003235901 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors SAKANO, Shinji; HARADA, Satoshi

Pub. Number AU-A-2003235901

PCT Number PCT/JP03/05782

PCT Pub. Number WO2003/098677

Priority 2002-142169 16.05.02 JP; 2002-193624 02.07.02 JP

Filing date 8 May 2003

Wipo publication date 2 December 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

4 September 2003 Complete Application Filed

  Priority application(s): 2002-142169 16.05.02 JP; 2002-193624 02.07.02 JP

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003235901

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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