SUBSTRATE PROCESSING DEVICE

Details for Australian Patent Application No. 2003231451 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MATSUOKA, Takaaki; IWABUCHI, Katsuhiko; ISHIZAWA, Shigeru; HIROKI, Tsutomu

Pub. Number AU-A-2003231451

PCT Number PCT/JP03/05830

PCT Pub. Number WO2003/096410

Priority 2002-136102 10.05.02 JP

Filing date 9 May 2003

Wipo publication date 11 November 2003

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B65G 049/07 Conveying systems characterised by their application for specified purposes not otherwise provided for - for semiconductor wafers

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 2002-136102 10.05.02 JP

15 January 2004 Application Open to Public Inspection

  Published as AU-A-2003231451

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

10 December 2009 Corrigenda

  Applications OPI - Name Index Under the name Tokyo Electron Limited , Application No. 2003231451 , under INID (43) correct the publication date to read 24.11.2003

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