POLYNUCLEAR METAL MOLECULAR BEAM APPARATUS

Details for Australian Patent Application No. 2003231450 (hide)

Owner NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventors NONAKA, Hidehiko; KUROKAWA, Akira; FUJIMOTO, Toshiyuki; ICHIMURA, Shingo

Pub. Number AU-A-2003231450

PCT Number PCT/JP03/05145

PCT Pub. Number WO2003/092033

Priority 2002/120091 23.04.02 JP

Filing date 23 April 2003

Wipo publication date 10 November 2003

International Classifications

H01J 027/02 Ion beam tubes - Ion sources

H01J 037/08 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Ion sources

H01J 027/20 Ion beam tubes

H01J 027/08 Ion beam tubes

H01J 027/24 Ion beam tubes

H01J 027/26 Ion beam tubes

Event Publications

14 August 2003 Complete Application Filed

  Priority application(s): 2002/120091 23.04.02 JP

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003231450

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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