METHOD FOR MANUFACTURING SILICON NITRIDE FILM USING CHEMICAL VAPOR DEPOSITION APPARATUS OF SINGLE CHAMBER TYPE

Details for Australian Patent Application No. 2003208031 (hide)

Owner EUGENE TECHNOLOGY CO., LTD.

Inventors UM, Pyung-Yong

Pub. Number AU-A-2003208031

PCT Number PCT/KR03/00265

PCT Pub. Number WO2003/067638

Priority 10-2002-0007427 08.02.02 KR

Filing date 6 February 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10-2002-0007427 08.02.02 KR

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003208031

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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