HEATER OF CHEMICAL VAPOR DEPOSITION APPARATUS FOR MANUFACTURING A THIN FILM

Details for Australian Patent Application No. 2003208030 (hide)

Owner EUGENE TECHNOLOGY CO., LTD.

Inventors UM, Pyung-Yong

Pub. Number AU-A-2003208030

PCT Number PCT/KR03/00264

PCT Pub. Number WO2004/070803

Filing date 6 February 2003

Wipo publication date 30 August 2004

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

30 September 2004 Application Open to Public Inspection

  Published as AU-A-2003208030

20 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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