METHOD FOR THE PRODUCTION OF A CAPACITOR IN A DIELECTRIC LAYER

Details for Australian Patent Application No. 2003205660 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors GOLLER, Klaus

Pub. Number AU-A-2003205660

PCT Number PCT/EP03/00671

PCT Pub. Number WO2003/063210

Priority 102 02 697.1 24.01.02 DE

Filing date 23 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 102 02 697.1 24.01.02 DE

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003205660

14 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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