METHODS OF FORMING STRUCTURE AND SPACER AND RELATED FINFET

Details for Australian Patent Application No. 2002364088 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors RAINEY, BethAnn; FRIED, David, M.; NOWAK, Edward, J.

Pub. Number AU-A-2002364088

PCT Number PCT/US02/40869

PCT Pub. Number WO2004/059727

Filing date 19 December 2002

Wipo publication date 22 July 2004

International Classifications

H01L 021/84 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2002364088

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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