FINFET SRAM CELL USING INVERTED FINFET THIN FILM TRANSISTORS

Details for Australian Patent Application No. 2002364087 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors NOWAK, Edward, J.; BREITWISCH, Matthew

Pub. Number AU-A-2002364087

PCT Number PCT/US02/40868

PCT Pub. Number WO2004/059703

Filing date 19 December 2002

Wipo publication date 22 July 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/44 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/84 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8238 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/00 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 029/04 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

17 July 2003 Complete Application Filed

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2002364087

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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