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Details for Australian Patent Application No. 2002354178 (hide)

Owner DISCO CORPORATION

Inventors KITAMURA, Masahiko

Pub. Number AU-A-2002354178

PCT Number PCT/JP02/12978

PCT Pub. Number WO2003/054943

Priority 2001-390114 21.12.01 JP

Filing date 11 December 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/301 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-390114 21.12.01 JP

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002354178

9 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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